利用晶體生長模擬軟件FEMAG進行藍寶石晶體生長模擬的方法

利用晶體生長模擬軟件FEMAG進(Jin)行藍寶石晶體生長模擬的方法第一頁，共三十三頁。CONFIDENTIALGeneralintroductionSapphireGrowthContent第二頁，共三十三頁。CONFIDENTIALIntroduction

Formorethan25years,FEMAGSoftdevelopssimulationsoftwarededicatedtotheresearchanddevelopmentofoptimalcrystalgrowthprocesses.1984 FirstresearchonGermaniumgrowthinUniversityofLouvain.

Prof.Fran?oisDupret1989 FirstresearchonSilicongrowthinUniversityofLouvain.1992 FirstcollaborationswithmajorICcompanies. Developmentofdefect-freesiliconwaferproduction.Today,morethan 35patentsarereferencingFEMAGSoftware2003 FEMAGSoftS.A.,spin-offfromUniversityofLouvain.2006 CollaboratrionwithmajorSolarcompanies. Developmentoflow-costandlow-oxygencontentprocesses.2009 Largeinvestmentforanewsoftwareframework 2010 ReleaseofSoftwareapplicationforSapphireingotproduction.第三頁，共三十三頁。CONFIDENTIALCzochralskiprocess第四頁，共三十三頁。CONFIDENTIALDirectionalSolidificationSystem第五頁，共三十三頁。CONFIDENTIALFloatingZoneProcess第六頁，共三十三頁。CONFIDENTIALSapphireGrowthbyCZandkyropoulos第七頁，共三十三頁。CONFIDENTIALSapphiregrowthbyHEM第八頁，共三十三頁。CONFIDENTIALWhatareFEMAGsoftware?Process-dedicatedsimulationtools,adaptedtoyourownprocessesandabletosolveyourproblems.Global

Allthefurnacecomponentsareconsidered.

Alltheheattransfermodeareconsidered(radiationtransfer,heatconduction,meltandgasconvection)InductionandohmicheatingTimeDependent第九頁，共三十三頁。CONFIDENTIALProcess-dedicatedtools

FEMAG-CZ :CzochralskiFEMAG-FZ :FloatingZoneFEMAG-VB :VerticalBridgmanFEMAG-CZ/OX :CzochralskiforSapphireFEMAG-KY :KyropoulosFEMAG-DS :DirectionalSolidificationFEMAG-HEM :HeatExchangeMethodGainoftime.ProcessmasteringAccurateandrighttothepoint第十頁，共三十三頁。CONFIDENTIALPlatformorientedFRAMEWORK:FEMAG3RADIATIONCONVECTION…MESHGEOMETRYCONDUCTIONFEMAG-CZFEMAG-HEMFEMAG-DSFEMAG-KYROPOULOSFEMAG3NEW2011Veryaccurate:FiniteElementandSpectralmethodsVeryefficient:3Dsimulationsinless1dayVeryflexible:Veryfastdevelopmentofnewdemand

…第十一頁，共三十三頁。CONFIDENTIALGlobalsimulations

CzochralskiFurnaceforSiliconHEMFurnaceforSapphireNosimplificationoftheprocessconditions第十二頁，共三十三頁。CONFIDENTIALDynamicsimulationsAdynamicsimulationtoolCompleteprocesssimulationDynamiceffectofinterfacedeformationVaryingprocessingconditions

第十三頁，共三十三頁。CONFIDENTIALSapphireCrystalGrowthSimulation

第十四頁，共三十三頁。CONFIDENTIALSapphireSimulationObjectiveThemarketofSapphireisexperiencingaveryfastgrowthrateandbecomeverycompetitiveManycompaniesinvestinsimulationsoftwareinordertoreinforcetheirpositionsHEM,CzochralskiandKyropoulosprocessrequireoptimizationandagoodunderstandingStrongneedforefficientnumericaltools.

Radiationeffectsintheparticipatingcrystalandmeltisacomplexproblem.第十五頁，共三十三頁。CONFIDENTIALSapphireSimulationObjectiveOurgoalistoprovideaccurate

simulationtool,abletotakealltheprocessfeaturesintoaccountandtooptimize

thegrowthprocessintermsoftheresultingcrystalquality.第十六頁，共三十三頁。CONFIDENTIALSapphireSimulationObjectiveKYROPULOSCZOCHRALSKIHEM第十七頁，共三十三頁。CONFIDENTIALFEMAG-CZ/OXFEMAG-CZ/OXSoftwaretosimulateSapphireGrowthbyCZandKyropoulosSpecifications:Temperatureinthesapphireand

inallfurnacecomponentsbysolvingtheglobalheattransferinthefurnace(radiation,conduction,convection).Flowvelocityinthesapphireliquidphase.Crystallizationfrontshape

OhmicandInductionHeatingAdvancedradiationheattransferinthesapphireGasconvectionAnisotropicthermalstressesinthecrystal第十八頁，共三十三頁。CONFIDENTIALTemperatureintheHotZoneFEMAG-CZ/OXCZprocess

withInductionHeatingsystemInductionHeating

system第十九頁，共三十三頁。CONFIDENTIALTemperatureinthecrystal

andinthemeltFEMAG-CZ/OXCZprocess

withInductionHeatingsystem第二十頁，共三十三頁。CONFIDENTIALMeltvelocityamplitude

FEMAG-CZ/OXCZprocess

withInductionHeatingsystemTheinterfaceshapeandpositionisaresultofthesimulation第二十一頁，共三十三頁。FEMAGSoft?2012Temperature

fieldinthemeltStream

functionFEMAG-CZ/OX/CZandKYROPOULOSprocess第二十二頁，共三十三頁。FEMAGSoft?2012Meltmeshes

BLM(boundarylayermesh)Coarse

meshBLMmeshisveryimportanttosimulatetheinterface第二十三頁，共三十三頁。FEMAGSoft?2012LocaltemperaturefieldResultusingcoarsemeshResultusingBLMmeshBLMmeshenablesabetterpredictionofthecrystalisationinterface第二十四頁，共三十三頁。FEMAGSoft?2012VelocityfieldResultusingcoarsemeshResultusingBLMmesh第二十五頁，共三十三頁。CONFIDENTIALFEMAG-HEMFEMAG-HEMSoftwaretosimulateSapphireGrowthbyHeatExchangeMethodSpecifications:Temperatureinthesapphireand

inallfurnacecomponentsbysolvingtheglobalheattransferinthefurnace(radiation,conduction,convection).Flowvelocityinthesapphireliquidphase.Crystallizationfrontshape

AdvancedradiationheattransferinthesapphireGasconvectionAnisotropicthermalstressesinthecrystal第二十六頁，共三十三頁。CONFIDENTIALFEMAG-HEMFEMAGSoftCADtooltointroducethegeometry第二十七頁，共三十三頁。CONFIDENTIALFEMAG-HEMGlobalTemperatureinthefurnace第二十八頁，共三十三頁。CONFIDENTIALFEMAG-HEMMeltconvectionDetailofmeltconvection第二十九頁，共三十三頁。CONFIDENTIALFEMAG-HEMTemperaturedistributioninthecrystalandmeltfordifferenttimesVelocityamplitudedistributioninthemeltfordifferenttimes第三十頁，共三十三頁。CONFIDENTIALAnisotropicThermalStress(HEMSapphireA-axis)FEMAG-HEMquasi-stead